Compact structure, suitable for limited space environment.
1.Adopt high precision cube spectrometer to instead of plate spectrometer, high inspection precision.
2.More suitable for tiny object inspection.
3.Compact structure, suitable for limited space environment
1.The damage inspection of the chip, wafer.
2.The scratch of reflective surface.
3.Bar code, QR code recognition.
4.Printing, silk-screen inspection.
Illumination property diagram
Uniformity (Relative irradiance)
Effect contrast photograph
Imaging instance: edge inspection
Features of spectrometer
◆ Easy integration with 0 degree incident angle
◆No light ray displacement
◆The transmitted and reflected light have same length
◆Shorten the system optical path
◆Heavy and sturdy glass structure
◆Difficult to do big size, and the cost is higher
|Flate plate spectrometer||
◆The cost is lower than cube spectrometer
◆Easy to do the big size
◆The transmitted and reflected light have different length
◆Transmitted light ray displacement
◆Need more time to aligning with 45 degree incident angle
|* UV & IR light can be customized as required.|